TECHNOLOGY JOINT SERVICE

CHAMBER

JST 챔버 용도 및 특장점

  • High Speed DRAM 검사시 온도 환경을 제공하는 챔버.
  • 극저온/초고온/고 발열칩 대응 가능.
  • Auto Door/Auto Contact/AGV를 이용한 Full Auto 기능 내장. (특허 보유)
  • Auto Temperature Calibration 기능(Option)
  • Energy Saving Operation(Option)

High Speed NAND Sample Test용

ITEM SPECIFICATION
Construction Chamber Quantity 8 Chamber
Slot 32 Slot, 16Slot/Chamber
Chamber Door Auto Door, Auto Lock
BIB Board Slot Contact Auto Contact
Dimension W10000 x D1920 x H2250
Weight 10,800kg
Temperature Operating Temp Range -40℃~125℃
Heat Load 1.5 Kw @ 4 Slot x 8 Zone
= 12 Kw
Temp. Uniformity / Load ±3.0℃ / 1.5kW
Heating & Cooling Time 40℃ to 125℃ ≤ 60 min
125℃ to -40℃ ≤ 60 min