TECHNOLOGY JOINT SERVICE

CHAMBER

JST 챔버 용도 및 특장점

  • DRAM, NAND 등 Sample 검사시 온도 환경을 제공하는 챔버.
  • 극저온/초고온/고 발열칩 대응 가능.
  • Auto Door/Auto Contact/AGV를 이용한 Full Auto 기능 내장.
  • Auto Temperature Calibration 기능(Option)
  • Energy Saving Operation(Option)

High Speed Memory Sample Test용

ITEM SPECIFICATION
Construction Chamber Quantity 16 Chamber
Slot 32 Slot, 16Slot/Chamber
Chamber Door Auto Door, Auto Lock
BIB Board Slot Contact Auto Contact
Dimension W2600 x D1600 x H2570
Weight 3,500kg
Temperature Operating Temp Range -10℃~150℃
Heat Load 0.35 Kw @ 1 Slot x 16 Zone
= 5.6 Kw
Temp. Uniformity / Load 10~125℃ : ±2.0℃ / No Load
126~150℃ : ±3.0℃ / No Load
Heating & Cooling Time -10℃ to 25℃ ≤ 10 min
25℃ to 150℃ ≤ 50 min
150℃ to 25℃ ≤ 30 min
25℃ to -10℃ ≤ 50 min